氟离子敏场效应管的研制

阐述了一种氟离子敏场效应晶体管(FISFET) 型传感器的结构和工作原理。它是在pH2ISFET传感器的基础上用PVC 方法把离子敏场效应晶体管和氟化物敏感膜相结合,制成氟离子敏场效应晶体管。该传感器具有全固态化‰体积小的特点。实验表明该传感器的灵敏度为50mV/ C , 响应时间:小于1min ,相关系数为0. 984 2 ,对氟化物的检测范围:1 ×10 - 6～1 ×10 - 1 mol/ L。
关键词: 离子敏场效应晶体管; 氟; 敏感材料
Abstract : The structure and basic working principle of a type of fluoride ion sensitive field effect transistor(FISFET) are presented. It is the base of hydrogen ion sensitive field effect transistor ,used fluoride sensitive membrane as ISFET gate. FISFET has a lot of advantages ,such as minimal size ,solid structure. some experiments have been done with the FISFET, The results show that the characteristics of the FISFET sensor are sensitivity :50 mV/ C ,resporse time :1min ,correlation coefficient :0. 984 2 ,measurement range :10- 6～10 - 1 mol/ L.
Key words : ion sensitive field effect transistor( ISFET) ; fluoride ; sensitive material